发明名称 |
BLANKMASK AND PHOTOMASK |
摘要 |
Provided is a photomask having a high-resolution pattern of a half-pitch of 32 nm or less (particularly, a half-pitch of 22 nm or less), which is manufactured by forming a blankmask in which a light-proof film and a hard film having a small thickness and high etch selectivity with respect to the light-proof film are formed on a transparent substrate. The photomask may have a high quality by adjusting a composition ratio of a metal, silicon (Si), and light elements that constitute the light-proof film to suppress damage to the pattern caused by an XeF2 gas in an electron-beam repair process. |
申请公布号 |
US2015093689(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
US201414503977 |
申请日期 |
2014.10.01 |
申请人 |
S&S TECH Co., Ltd. |
发明人 |
NAM Kee-Soo;KANG Geung-Won;SHIN Cheol;LEE Jong-Hwa;YANG Chul-Kyu;KIM Chang-Jun;JEONG See-Jun;JANG Kyu-Jin |
分类号 |
G03F1/46;G03F1/38 |
主分类号 |
G03F1/46 |
代理机构 |
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代理人 |
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主权项 |
1. A blankmask which comprises a light-proof film and a hard film formed on a transparent substrate, wherein a degree to which the light-proof film is damaged by an injected gas in a repair process after a pattern is formed is digitized in an anisotropic ratio of 0 to 0.5, wherein the anisotropic ratio is a ratio of a lateral damage to an etched depth of the pattern. |
地址 |
Daegu KR |