发明名称 |
METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT |
摘要 |
A method for repairing a collector for an EUV projection exposure apparatus having a first coating and a second coating, wherein the first coating is arranged between the second coating and a surface of the collector. The method includes completely or partly removing the first coating by treatment with a first chemical solution, and applying a new first coating. |
申请公布号 |
US2015092170(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
US201414519449 |
申请日期 |
2014.10.21 |
申请人 |
Carl Zeiss Laser Optics GmbH |
发明人 |
Ehrler Oli;Meier Uwe;Uhl Alexander;Kierey Holger |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Oberkochen DE |