STRESS BUFFER LAYER FOR INTEGRATED MICROELECTROMECHANICAL SYSTEMS (MEMS)

摘要

Stress buffer layers for integrated microelectromechanical systems (MEMS) are described. For example, a semiconductor package includes a substrate having first and second surfaces, the second surface having an array of external conductive contacts. A microelectromechanical system (MEMS) component is disposed above the first surface of the substrate. A buffer layer is disposed above the MEMS component, the buffer layer having a first Young's modulus. A mold compound is disposed above the buffer layer, the mold compound having a second Young's modulus higher than the first Young's modulus.

主权项

1. A semiconductor package, comprising:
a substrate comprising first and second surfaces, the second surface comprising an array of external conductive contacts; a microelectromechanical system (MEMS) component disposed above the first surface of the substrate; a buffer layer disposed above the MEMS component, the buffer layer having a first Young's modulus; and a mold compound disposed above the buffer layer, the mold compound having a second Young's modulus higher than the first Young's modulus.