Micromagnet Based Extreme Ultra-Violet Radiation Source

摘要

An embodiment includes a magnetic wiggler comprising: first and second magnets adjacent each other in a line of at least 50 magnets; a pathway, adjacent to the line, along which an electron beam may travel that is to couple to a particle accelerator; and a plurality of vias on multiple sides of each of the first and second magnets to provide multiple currents, having opposite directions, respectively to the first and second magnets to orient the first and second magnets with opposing non-volatile orientations. Other embodiments are provided herein.

主权项

1. An apparatus comprising:
first, second, and third magnets immediately adjacent one another in a first line, and additional magnets in a second line; a pathway, between the first and second lines, along which an electron beam may travel that is arranged to couple to a particle accelerator; a first via between the first and second magnets to pass current that provides a first magnetic field, having a first orientation, to the first magnet; and a second via adjacent the second magnet to pass current that provides a second magnetic field, having a second orientation opposite the first orientation, to the second magnet.