| 主权项 |
1. Target processing unit, comprising:
a projection column for generating, shaping, and directing a beam toward a target, wherein the projection column comprises a projection lens assembly for directing the beam toward the target; a carrier frame for accommodating the projection lens assembly,wherein the projection lens assembly comprises:
a flat lens support body for accommodating a lens element, wherein the lens support body spans a plane and comprises a connection region and a lateral edge, and wherein the lens support body is arranged for insertion along an insertion direction parallel with the plane into the carrier frame; a plurality of conduits emanating from the connection region and directed parallel with the plane; and a conduit guiding body arranged for accommodating the conduits,wherein the conduit guiding body comprises:
a first guiding portion that is arranged for guiding the conduits from the connection region, parallel with the plane, and with a non-zero direction component perpendicular to the insertion direction, to a lateral region beyond the lateral edge; and a second guiding portion for guiding the conduits from the lateral region with a non-zero direction component perpendicular to the plane toward a tilted edge of the conduit guiding body. |
