| 发明名称 |
ILLUMINATION OPTICAL UNIT |
| 摘要 |
An illumination optical unit comprises a first faceted element and a second faceted element having a multiplicity of displaceable micromirrors which can be grouped flexibly to form facets. |
| 申请公布号 |
US2015092174(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201414567645 |
申请日期 |
2014.12.11 |
| 申请人 |
Carl Zeiss SMT GmbH |
发明人 |
Endres Martin;Patra Michael |
| 分类号 |
G03F7/20;G21K1/06 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
Oberkochen DE |
