发明名称 |
CELL STRUCTURE OF VDMOS DEVICE AND MANUFACTURING METHOD THEREFOR |
摘要 |
A cell structure of a VDMOS device and a manufacturing method therefor are provided. The cell structure comprises: a drain region (601); an epitaxial layer (602) positioned on the drain region; trenches positioned in the epitaxial layer; field oxide layers (604, 611) lined on the inner walls of the trenches; conductive layers (603, 612) lined on the inner walls of the field oxide layers; gate structures (607, 608) positioned on the epitaxial layer; a first well region (605) and a second well region (610) positioned in the epitaxial layer and between the trenches, and a first source region (606) embedded in the first well region and a second source region (609) embedded in the second well region. By adding the field oxide layers and the conductive layers on the basis of the cell structure of a planar gate VDMOS device, the conduction resistance of the cell structure of the VDMOS device can be effectively reduced. |
申请公布号 |
WO2015043102(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
WO2013CN91144 |
申请日期 |
2013.12.31 |
申请人 |
WUXI CHINA RESOURCES HUAJING MICROELECTRONICS CO., LTD. |
发明人 |
TANG, HONGXIANG;SUN, YONGSHENG;JI, JIANXIN;WANG, GUOPING |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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