| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample observation method with which an observation object position can be quickly and accurately identified.SOLUTION: A sample observation method of the present invention is a compound type sample observation method for observing a sample placed on a single stage with a mapping projection type observation device and an SEM type observation device and optical microscope separate from the mapping projection type observation device. In the sample observation method of the present invention, images of an observation target sample can be obtained by the observation of the sample by the optical microscope, observation of the sample through a mirror electron image, and observation of the sample through an SEM image; and the positions on the observation target sample corresponding to the images can be associated with each other. With this configuration, even when the observation object position identified by one of the above three observation methods is to be observed by another observation method, the observation object position can be quickly and accurately identified. |
