LOW RESISTANCE MICROFABRICATED FILTER

摘要

The present technology provides microfabricated filtration devices, methods of making such devices, and uses for microfabricated filtration devices. The devices may allow diffusion to occur between two fluids with improved transport resistance characteristics as compared to conventional filtration devices. The devices may include a compound structure that includes a porous membrane overlying a support structure. The support structure may define a cavity and a plurality of recesses formed in a way that can allow modified convective flow of a first fluid to provide improved diffusive transport between the first fluid and a second fluid through the membrane.

主权项

1. A microfabricated filtration device comprising:
a planar membrane section comprising a plurality of pores, each pore having a width of less than about 100 nm; and a support section comprising a substrate coupled with the membrane section, the substrate comprising a plurality of thick portions and a plurality of recesses between the thick portions in a second thin portion that is between adjacent thick portions, wherein the recesses are in communication with the pores in the plurality of pores.