| 摘要 |
The present invention has a subject to provide a spin processor capable of suppressing and occurrence of dust and a mis-orientation of substrate position at a clamping. A spin processing device (1) is a spin processing device to process a substrate (W) through a rotation, which comprises: at least three clamp pins (21) which is in contact with an outer circumferential surface of the substrate (W) respectively to grip the substrate (W); a plurality of movable pin rotary body (23) installed to every clamp pin (21) and maintained by biasing the clamp pin (21) from its rotary shaft which is parallel with a rotary shaft of the substrate (W); a plurality of magnet gears (31a) installed in an outer circumferential surface of the pin rotary body (23) to every pin rotary body (23) wherein a magnetic pole is formed in a shape of a spiral along the axial direction of a rotary shaft of the pin rotary body (23); a plurality of magnets for rotation (31b) installed to every magnet gear (31a) and positioned so as to pull each other with a magnetic pole of the magnet gear (31a); and a moving device to move a plurality of magnet for rotation (31b) along the axial direction of the rotary shaft of the pin rotary body (23). |
