COLD CATHODE IONIZATION VACUUM GAUGE

摘要

A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

主权项

1. A cold cathode ionization vacuum gauge assembly comprising an ion gauge, the ion gauge comprising:
an extended anode electrode; a cathode electrode surrounding the anode electrode along its length, one end of the cathode electrode being connected to a flange; and a magnetic coupler connected to the flange; and a magnet assembly configured to be slidably mounted over the cathode and magnetically coupled to the magnetic coupler.