发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 This semiconductor device manufacturing method includes: a step (A) for preparing a sheet-like resin composition-attached chip that has a sheet-like resin composition bonded to a semiconductor chip; a step (B) for preparing a body to which the chip is to be bonded; a step (C) for bonding, to the body, the sheet-like resin composition-attached chip by having the sheet-like resin composition as a bonding surface; a step (D) for semi-curing the sheet-like resin composition by heating the composition after the step (C); and a step (E) for curing the sheet-like resin composition by heating, after the step (D), the composition at a temperature that is higher than a heating temperature in the step (D).
申请公布号 WO2015046073(A1) 申请公布日期 2015.04.02
申请号 WO2014JP74899 申请日期 2014.09.19
申请人 NITTO DENKO CORPORATION 发明人 HANAZONO, HIROYUKI;TAKAMOTO, NAOHIDE;FUKUI, AKIHIRO
分类号 H01L21/60;H01L21/52 主分类号 H01L21/60
代理机构 代理人
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