发明名称 |
CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME |
摘要 |
A method of operating a charged particle beam system, the method comprises extracting a particle beam from a source; performing a first accelerating of the particles of the beam; forming a plurality of particle beamlets from the beam after the performing of the first accelerating; performing a second accelerating of the particles of the beamlets; performing a first decelerating of the particles of the beamlets after the performing of the second accelerating; deflecting the beamlets in a direction oriented transverse to a direction of propagation of the particles of the beamlets after the performing of the first decelerating; performing a second decelerating of the particles of the beamlets after the deflecting of the beamlets; and allowing the particles of the beamlets to be incident on an object surface after the performing of the second decelerating. |
申请公布号 |
WO2015043769(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
WO2014EP02656 |
申请日期 |
2014.09.30 |
申请人 |
CARL ZEISS MICROSCOPY GMBH;APPLIED MATERIALS ISRAEL LTD. |
发明人 |
SCHUBERT, STEFAN;KEMEN, THOMAS;KNIPPELMEYER, RAINER |
分类号 |
H01J37/28 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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