| 发明名称 |
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE |
| 摘要 |
The present invention provides an imprint apparatus for molding an imprint material on a target region on a substrate using a mold to form a pattern on the target region, the apparatus comprising a heater configured to deform the target region by heating the substrate, a measurement device configured to measure an overlay state between the target region and the mold, and a controller configured to control the heater such that the overlay state falls within a tolerance. |
| 申请公布号 |
US2015091199(A1) |
申请公布日期 |
2015.04.02 |
| 申请号 |
US201414491014 |
申请日期 |
2014.09.19 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Murakami Yosuke |
| 分类号 |
B29C59/02 |
主分类号 |
B29C59/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An imprint apparatus for molding an imprint material on a target region on a substrate using a mold to form a pattern on the target region, the apparatus comprising:
a heater configured to deform the target region by heating the substrate; a measurement device configured to measure an overlay state between the target region and the mold; and a controller configured to control the heater such that the overlay state falls within a tolerance. |
| 地址 |
Tokyo JP |
