METHOD FOR PRODUCING A MICROSYSTEM HAVING A THIN FILM MADE OF LEAD ZIRCONATE TITANATE

摘要

A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).

主权项

1. A method for producing a micro system, comprising:
providing a substrate made of aluminum oxide; producing a thin film on the substrate by depositing lead zirconate titanate onto the substrate with a thermal deposition method such that the lead zirconate titanate in the thin film is self-polarized and is present predominantly in a rhombohedral phase; and cooling down the substrate together with the thin film.