发明名称 |
AUTOMATED HEAT EXCHANGER ALIGNMENT |
摘要 |
According to the disclosed embodiments, a repeatable interface in a crystalline material growth system is achieved through an automated heat exchanger alignment apparatus and method. In one embodiment, a furnace chamber including a bottom wall and side walls that define an interior portion is provided. A crucible is disposed in the interior portion of the furnace chamber and configured to contain a crystalline material growth process. Also, a heat exchanger includes an elongated shaft that extends in a vertical direction and traverses the bottom wall of the furnace chamber, whereby a first end portion of the heat exchanger shaft is coupled to the crucible. Furthermore, an automated lifting device is configured to be actuated to adjust a position of the heat exchanger shaft in the vertical direction, whereby a second end portion of the heat exchanger shaft is coupled to the automated lifting device. |
申请公布号 |
US2015090181(A1) |
申请公布日期 |
2015.04.02 |
申请号 |
US201414488508 |
申请日期 |
2014.09.17 |
申请人 |
GT Crystal Systems, LLC |
发明人 |
Brouillette John;Farmer Robert B.;Parpart Kay;Schuyler Timothy R. |
分类号 |
C30B11/00 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
1. An apparatus, comprising:
a furnace chamber including a bottom wall and side walls that define an interior portion; a crucible disposed in the interior portion of the furnace chamber and configured to contain a crystalline material growth process; a heat exchanger including an elongated shaft that extends in a vertical direction and traverses the bottom wall of the furnace chamber, a first end portion of the heat exchanger shaft being coupled to the crucible; and an automated lifting device configured to be actuated in an actuation direction to adjust a position of the heat exchanger shaft in the vertical direction, a second end portion of the heat exchanger shaft being coupled to the automated lifting device. |
地址 |
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