发明名称 AUTOMATED HEAT EXCHANGER ALIGNMENT
摘要 According to the disclosed embodiments, a repeatable interface in a crystalline material growth system is achieved through an automated heat exchanger alignment apparatus and method. In one embodiment, a furnace chamber including a bottom wall and side walls that define an interior portion is provided. A crucible is disposed in the interior portion of the furnace chamber and configured to contain a crystalline material growth process. Also, a heat exchanger includes an elongated shaft that extends in a vertical direction and traverses the bottom wall of the furnace chamber, whereby a first end portion of the heat exchanger shaft is coupled to the crucible. Furthermore, an automated lifting device is configured to be actuated to adjust a position of the heat exchanger shaft in the vertical direction, whereby a second end portion of the heat exchanger shaft is coupled to the automated lifting device.
申请公布号 US2015090181(A1) 申请公布日期 2015.04.02
申请号 US201414488508 申请日期 2014.09.17
申请人 GT Crystal Systems, LLC 发明人 Brouillette John;Farmer Robert B.;Parpart Kay;Schuyler Timothy R.
分类号 C30B11/00 主分类号 C30B11/00
代理机构 代理人
主权项 1. An apparatus, comprising: a furnace chamber including a bottom wall and side walls that define an interior portion; a crucible disposed in the interior portion of the furnace chamber and configured to contain a crystalline material growth process; a heat exchanger including an elongated shaft that extends in a vertical direction and traverses the bottom wall of the furnace chamber, a first end portion of the heat exchanger shaft being coupled to the crucible; and an automated lifting device configured to be actuated in an actuation direction to adjust a position of the heat exchanger shaft in the vertical direction, a second end portion of the heat exchanger shaft being coupled to the automated lifting device.
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