发明名称 Transducer arrangement comprising a transducer die and method of covering a transducer die
摘要 According to an exemplary aspect a transducer arrangement comprising a supporting structure; a transducer die arranged on the supporting structure; and a lid comprising a porous material connected to the supporting structure and arranged to at least partially cover the transducer die.
申请公布号 US2015090030(A1) 申请公布日期 2015.04.02
申请号 US201314039365 申请日期 2013.09.27
申请人 Infineon Technologies AG 发明人 THEUSS Horst
分类号 G01D11/24;H01L21/52 主分类号 G01D11/24
代理机构 代理人
主权项 1. A transducer arrangement comprising: a supporting structure; a transducer die arranged on the supporting structure; a lid comprising a porous material connected to the supporting structure and arranged to at least partially cover the transducer die.
地址 Neubiberg DE