发明名称 寄生負荷最小化光学素子モジュール
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a support structure which supports an optical element unit and comprises a contact device placed in the support device. <P>SOLUTION: By the action of the holding force generated on an optical element unit 108 in a first direction via a first contact face 109.5 of a contact device, the first contact face is in contact with a second contact face of the optical element unit. The contact device comprises a first link part and a second link part which extend along a second direction transverse to the first direction. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5695011(B2) 申请公布日期 2015.04.01
申请号 JP20120239984 申请日期 2012.10.31
申请人 发明人
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
代理机构 代理人
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