发明名称 |
MULTIPLE-COLUMN ELECTRON BEAM APPARATUS AND METHODS |
摘要 |
One embodiment disclosed relates an apparatus which includes an electromagnet arranged to provide a large-scale magnetic field in a region. The apparatus further includes an array of multiple electron beam columns formed in the region using an array of bores through magnetic material. Another embodiment relates to a method of generating an array of electron beams. A large-scale magnetic field is generated in a region using at least two magnetic poles. The array of electron beams is generated using an array of columns formed using bores through a magnetic material positioned in the region. Other embodiments, aspects and features are also disclosed. |
申请公布号 |
EP2727129(A4) |
申请公布日期 |
2015.04.01 |
申请号 |
EP20120804024 |
申请日期 |
2012.06.26 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
SHADMAN, KHASHAYAR;HAYNES, ROBERT G.;SEARS, CHRISTOPHER M.;NASSER-GHODSI, MEHRAN |
分类号 |
H01J37/06;H01J37/10;H01J37/14;H01J37/30 |
主分类号 |
H01J37/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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