发明名称 |
LOW-POWER GASEOUS PLASMA SOURCE |
摘要 |
<p>A plasma source includes a first rod forming a quarterwave antenna, surrounded by at least one parallel rod forming a coupler and which is substantially the same length as the first rod, set to a reference potential, the coupler rods being evenly distributed radially about the first rod, at a distance of around one-fifth to one-twentieth of the quarter of the wavelength.</p> |
申请公布号 |
EP2338318(B1) |
申请公布日期 |
2015.04.01 |
申请号 |
EP20090760171 |
申请日期 |
2009.10.16 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE |
发明人 |
SORTAIS, PASCAL;LAMY, THIERRY |
分类号 |
H05H1/46;H01J27/16;H01J37/08;H01J37/317 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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