发明名称 炭化珪素単結晶、炭化珪素半導体基板およびその製造方法
摘要 <p>A silicon carbide semiconductor substrate is made of a silicon carbide single crystal and is formed with a stamp on at least a surface as an identification indication formed of a crystal defect. When a silicon carbide single crystal is allowed to grow using the silicon carbide semiconductor substrate as a seed crystal, the stamp can be propagated to the silicon carbide single crystal as a crystal defect. When silicon carbide semiconductor substrates are manufactured using the silicon carbide single crystal, the stamp has already been formed on each of the silicon carbide semiconductor substrates.</p>
申请公布号 JP5692195(B2) 申请公布日期 2015.04.01
申请号 JP20120220403 申请日期 2012.10.02
申请人 发明人
分类号 H01L21/02;C30B29/36;H01L21/304 主分类号 H01L21/02
代理机构 代理人
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