| 摘要 |
<p>The microscope apparatus includes a light source which outputs linear polarization having a first wavelength, a polarization conversion element which includes a liquid crystal layer, and by causing linear polarization to pass the liquid crystal layer, converts linear polarization to radial polarization, an objective lens which focuses the radial polarization onto an object surface, a condenser lens which collimates the light reflected from the object surface, a light receiving element which receives light collimated by the condenser lens and outputs signal in accordance with the intensity of light, and a controller which applies electric voltage in accordance with the first wavelength to the liquid crystal layer of the polarization conversion element. The polarization conversion element is disposed in the pupil plane of the objective lens on the light source side.</p> |
