| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface machining device for efficiently grinding and polishing a work to be machined. <P>SOLUTION: In a load unit 30 of a surface machining device 20, a work W is adsorbed by a transfer chuck 10. The work W fixed to the transfer chuck is carried to a grinding unit 40 to be ground. When finishing the grinding, the work W fixed to the transfer chuck 10 is carried to a polishing unit 50. When the work W reaches a number of sheets for batch processing, polishing is carried out by the batch processing. When finishing the polishing, the work W fixed to the transfer chuck 10 is carried to the load unit 30. Then, the work W is removed from the transfer chuck 10, and respectively washed. A new work W is adsorbed by the transfer chuck 10. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
