| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily obtain a three-dimensional image without finely processing a sample. <P>SOLUTION: An x-ray analysis apparatus includes: an x-ray source for emitting an x-ray; a mask part forming a transmission window for transmitting the x-ray and a plurality of reference holes smaller than the transmission window and arranged on coherent positions of the x-ray on a base material for shielding the x-ray; an observing sample part including a sample to be irradiated with the x-ray transmitted through the mask part and a sample support member for supporting the sample; a detector for detecting a hologram generated by interference between a scattered x-ray generated by the sample irradiated with the x-ray and a reference x-ray passed through the reference hole and a hologram generated by interference between reference x-rays passed through the plurality of reference holes; and a processing part for performing processing for obtaining a three-dimensional image of the sample on the basis of the hologram caused by the interference between the reference x-rays and obtained by the detector. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
