| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform origin return operation of four-axial control while suppressing mutual interference between mechanical attitudes of driving shafts. <P>SOLUTION: The four-axial alignment stage is equipped with four driving units each comprising an XYθguide and a ball screw direct-acting mechanism. A temporary origin position is set for each driving unit (S1), and origin return operation under four-axial control is performed based thereupon (S3). Then all-axis simultaneous servo-off operation is performed (S4), and a movement quantity of a guide block of each driving unit generated right after that is measured (S5) and stored (S6). The temporary origin position of each driving unit is corrected using a measured value of the movement quantity as a correction quantity (S7), and origin return operation based upon the origin position having been corrected, measurement and storage of a movement quantity right after all-axis simultaneous servo-off operation, and correction of the temporary origin position using a measured value of the movement quantity as a correction quantity are repeated. A temporary origin position when the movement quantity right after the all-axis simultaneous servo-off operation converges is set as an original position for actual origin return operation under the four-axial control. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
