| 摘要 |
The objective of the present invention is to provide an organic matter depositing device, capable of detecting a deposit amount of an organic matter deposited in a vacuum chamber by detecting back propagation property changes of a passive radio frequency identification (RFID) sensor. According to an embodiment of the present invention, the organic matter depositing device comprises: a chamber to perform an organic depositing process; a depositing source which is installed in the chamber to vaporize an organic matter; a depositing mask which is installed to face the depositing source to bond a substrate to an opposite side of the depositing source; an antenna which is installed in the chamber to receive back propagation from an RFID sensor mounted on the substrate; and a radio frequency (RF) reader which is connected to the antenna to measure a deposit amount of the organic matter from changes in an amount of the back propagation. |
