| 摘要 |
<p>The present invention relates to a thickness measuring device. The thickness measuring device of the present invention using a reflectometer is characterized by including a light source; an optical filter unit selectively transmitting multiple different frequencies by receiving light emitted from the light source to modify the light into light having an intensity distribution and capable of controlling the bandwidth of the light having the intensity distribution; an optical system emitting the light modified by the optical filter unit to an object to be measured and receiving the light reflected by the object; an optical detecting unit receiving the light penetrated through the optical system to obtain reflectance information; and a control unit setting the multiple frequencies capable of being transmitted through the optical filter unit to control the bandwidth of the light modified by the optical filter unit and comparing theoretical reflectance information remodeled by an equation and recorded in advance and the reflectance information obtained by the optical detecting unit to measure the thickness of the object. Therefore, according to the present invention, the thickness measuring device capable of improving the accuracy of measuring thickness regardless of a material of the object or a measurement position is provided.</p> |
