发明名称 CONTACT APPARATUS
摘要 <p>Provided is a contact apparatus capable of securing a contact while a moving member (or an additional member installed in the moving member) is in contact with an object without pressuring the object. A contact head part included in a contact apparatus (1) includes a contact rod (21), a housing (22), a thrust air path (32), and a cancel air path (33). The housing (22) moves the contact head part (11) straight and support the same by a constant pressure air bearing. Thus, the contact rod (21) can touch an object (3). When compressed air is supplied to the thrust air path (32), the force of approaching the object (3) is applied to the contact rod (21). When compressed air is supplied to the cancel air path (33), the opposite force is applied to the contact rod (21). A control unit (12) controls the compressed air pressure to the thrust air path (32) and to the cancel air path (33) while the contact rod (21) is in contact with the object (3), thus, making the pressure onto the object (3) zero.</p>
申请公布号 KR20150033531(A) 申请公布日期 2015.04.01
申请号 KR20140116047 申请日期 2014.09.02
申请人 发明人
分类号 H01L21/60;H01L21/603 主分类号 H01L21/60
代理机构 代理人
主权项
地址