显影装置、显影方法及记忆媒体;DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

摘要

本发明之显影装置包含：基板保持部，其将基板保持水平；显影液喷嘴，其用来对基板供给显影液以形成液滴；回旋流产生机构，其包含在接触该液滴的状态下绕与基板正交之轴旋转的旋转构件，使形成在该基板上的显影液的液滴产生回旋流；以及移动机构，其使该回旋流产生机构沿着基板的表面移动。于基板的吾人所期望的区域形成回旋流，搅拌显影液，藉此达到提高图案的线宽的均一性之目的。; a developer nozzle that supplies a developer onto the substrate to form a liquid puddle; a turning flow generation mechanism including a rotary member that rotates about an axis perpendicular to the substrate while the rotary member is being in contact with the liquid puddle thereby to generate a turning flow in the liquid puddle of the developer formed on the substrate; and a moving mechanism for moving the turning flow generation mechanism along a surface of the substrate. The line-width uniformity of a pattern can be improved by forming turning flows in a desired region of the substrate and stirring the developer.