发明名称 ダイシングブレード
摘要 An object of the present invention is to provide a dicing blade which does not cause cracking and breaking even in a workpiece formed from a brittle material, and can stably perform cutting process in a ductile mode on the workpiece with high precision. A dicing blade 26 which performs the cutting process on the workpiece is integrally formed of a diamond sintered body 80 which is formed by sintering diamond abrasive grains 82 so as to have a discoid shape, and a content of the diamond abrasive grains 82 of the diamond sintered body 80 is 80 vol% or more. It is preferable that recessed parts which are formed on a surface of the diamond sintered body 80 are continuously provided in an outer circumferential part of the dicing blade 26 along a circumferential direction.
申请公布号 JP5693781(B2) 申请公布日期 2015.04.01
申请号 JP20140236666 申请日期 2014.11.21
申请人 株式会社東京精密;株式会社新日本テック;渡邉 純二 发明人 藤田 隆;和泉 康夫;渡邉 純二
分类号 H01L21/301;B24D3/00;B24D5/12 主分类号 H01L21/301
代理机构 代理人
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