液晶显示装置;LIQUID CRYSTAL DISPLAY DEVICE

摘要

本发明的目的为提出一种在批量生产时可以高生产率地制造包括电特性的可靠性高的薄膜电晶体的液晶显示装置的方法。本发明的要旨为如下：在包括反交错薄膜电晶体的液晶显示装置中，反交错薄膜电晶体由以下步骤形成：在闸极电极上形成闸极绝缘膜，在闸极绝缘膜上形成用作通道形成区域的微晶半导体膜，在微晶半导体膜上形成缓冲层，在缓冲层上形成一对源区域及汲区域；以使源区域及汲区域的一部分露出的方式形成与源区域及汲区域接触的一对源极电极及汲极电极。; a microcrystalline semiconductor film which functions as a channel formation region is formed over the gate insulating film; a buffer layer is formed over the microcrystalline semiconductor film; a pair of source and drain regions are formed over the buffer layer; and a pair of source and drain electrodes are formed in contact with the source and drain regions so as to expose a part of the source and drain regions.