发明名称 半導体集積回路の電源制御システムおよび電源制御方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit power control system which, when power supply noise occurs in a semiconductor integrated circuit, can reduce the impedance of power supply wiring and the power supply voltage, thereby making it possible to suppress a power supply noise amplitude and cut down power consumption. <P>SOLUTION: A variable voltage source 2, semiconductor integrated circuits 3 and 4 to which the power is supplied, and a power supply control circuit 1 which controls the variable voltage source are included. The semiconductor integrated circuits include a parallel resonance circuit comprised of an inductance 31 and an internal element capacitance 43b, a variable resistance 41 provided on power supply wiring of the parallel resonance circuit, and a voltage sensor 42 which compares the voltage supplied from the variable voltage source to the parallel resonance circuit with a reference voltage and outputs a comparison result. The power supply control circuit selects a value of the variable resistance according to the frequency of a signal flowing in the power supply wiring and sets a prescribed voltage value for the variable voltage source according to the output result of the voltage sensor. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5691670(B2) 申请公布日期 2015.04.01
申请号 JP20110050913 申请日期 2011.03.09
申请人 发明人
分类号 H01L21/822;G05F1/00;H01L27/04 主分类号 H01L21/822
代理机构 代理人
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