| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a glass fine particle deposited body, in which the productivity of glass fine particle deposited bodies can be improved by reducing the frequency of cleaning treatment for removing soot on a chamber wall surface and thereby increasing the rate of apparatus operation, and in which cleaning treatment is implemented with proper timing of implementation, so that a high quality glass fine particle deposited body can stably be produced. <P>SOLUTION: In the method for producing a glass fine particle deposited body, a glass fine particle deposited body 17 is produced in an apparatus including burners 11a-11h for generating glass fine particles toward a starting substrate 5 and exhaust systems 13a, 13b, 13c for exhausting glass fine particles which do not deposit on the starting substrate 5, wherein the percentage of glass fine particles exhausted by the exhaust systems 13a, 13b, 13c in glass fine particles which do not deposit on the starting substrate 5 is calculated, and the frequency of cleaning treatment for removing soot adhered in the apparatus is set to be lower as the exhaust percentage becomes higher. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
