| 摘要 |
<p>A coating liquid for forming a silica-based coating film is provided to ensure high film strength, excellent surface flatness, resistance to cracking, and a relatively low non-dielectric rate. A coating liquid for forming a silica-based coating film comprises silicides. The silicides are obtained by heating a dispersion having one or more organic silicon compounds and basic catalytic component-containing silica based minute particles and partly hydrolyzing the organic silicon compounds. The organic silicon compound is selected from the group consisting of alkoxy silane(RnSi(OR')4-n) and silane halide(RnSiX4-n).</p> |
