发明名称 流体ジェットを用いて孔を作製する方法
摘要 <p>The method for making a hole in a layer includes the provision of first and second adhesion areas on a surface of a support. The first area has dimensions corresponding to the dimensions of the hole. The method includes depositing a layer on the first and second adhesion areas. The material of the layer has an adhesion coefficient to the first area lower than the adhesion coefficient to the second area. The part of layer arranged above the first area is eliminated by a fluid jet.</p>
申请公布号 JP5694373(B2) 申请公布日期 2015.04.01
申请号 JP20120546479 申请日期 2010.12.22
申请人 发明人
分类号 H01L21/768;B26F1/26;H01L23/532 主分类号 H01L21/768
代理机构 代理人
主权项
地址