多荷电粒子束描绘方法及多荷电粒子束描绘装置;MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

摘要

本发明之一形态的多荷电粒子束描绘方法，其特征为：射束的每1发射的最大照射时间会被分割成位数个的复数的第1照射时间，作为相当于分别以10进位来定义上述位数的2进位的各位数的值时之阶级值乘以量子化单位的照射时间，利用复数的第1照射时间的一部分的第2照射时间更被分割成复数的第3照射时间之复数的第3照射时间及未被分割之剩下的复数的第1照射时间，按射束的每发射，将该射束的照射分割成复数的第3照射时间的各照射步骤及未被分割之剩下的复数的第1照射时间的各照射步骤，以藉由至少2个照射步骤的组合所构成的复数的群组能够依序连接之方式，按每个群组，将构成该群组的各照射步骤的照射时间的射束依序照射至试料。; dividing second irradiation time periods, which are a part of the first irradiation time periods into third irradiation time periods; dividing irradiation of each beam into the first irradiation steps of the third irradiation time periods and second irradiation steps of the remaining undivided first irradiation time periods; and irradiating a target object, in order, with the multi beams such that the groups are respectively composed of combination of at least two irradiation steps of first irradiation steps and second irradiation steps and the groups continue in order.