| 摘要 |
<p>The present invention relates to a pollutant processing apparatus which processes a pollutant inside a pipe by being installed in the pipe. The pollutant processing apparatus comprises: processing blocks arranged outside the pipe and heating and cooling the pipe; a cooling portion which cools down heat radiated through the processing blocks by being combined with external sides of the processing blocks; and a controller which controls heat radiation and heat absorption effects. According to an embodiment of the present invention, the pollutant processing apparatus can prevent a process byproduct from being accumulated inside the pipe by maintaining a constant temperature by heating the pipe using a thermoelectric element. In addition, the present invention can remove the attached process byproduct or a particle by applying thermal stress inside the pipe by repeating heating and cooling the pipe using the thermoelectric element outside the pipe. Therefore, the process byproduct is smoothly discharged outward and malfunctioning of a vacuum pump is restricted since the pipe is not blocked by the particle. Thus, the present invention is effective in extending the lifespan of the vacuum pump since malfunctioning of the vacuum pump is restricted. Like this, by preventing various kinds of byproducts from being attached inside the pipe and by removing the process byproduct and the particle, the present invention can reduce costs due to malfunctioning of the vacuum pump since the pipe is not blocked.</p> |
