太阳光发电装置用基板的制造方法及太阳光发电装置用基板的制造装置;METHOD FOR PRODUCING SUBSTRATE FOR SOLAR-ELECTRONIC DEVICE AND APPARATUS FOR PRODUCING SUBSTRATE FOR SOLAR-ELECTRONIC DEVICE

摘要

本发明提供一种太阳光发电装置用基板的制造方法，系在将半导体晶锭切片而切出半导体基板后，于前述半导体基板的表面施行表面处理而形成纹理构造者，包含：洗净步骤，系利用包含氧化性药剂之洗净液来洗净去除附着于前述半导体基板之表面的有机杂质与金属杂质；蚀刻步骤，系于前述洗净步骤后接连着进行，利用硷性水溶液对前述半导体基板的表面进行异方性蚀刻，藉此去除由前述切片所产生之基板表面的损伤层，并且于前述半导体基板的表面形成前述纹理构造。; an etching step of conducting an anisotropic etching on the surface of the semiconductor by an aqueous alkali solution after the cleaning step for removing a damaged layer formed on the surface of the substrate due to slicing, and forming the texture structure on the surface of the substrate semiconductor.