NEAR-FIELD SCANNING OPTICAL MICROSCOPE SYSTEM AND PROBE METHODS USING THE SAME

摘要

Disclosed is a near field scanning optical microscope system and a probe method using the same. The near field scanning optical microscope system of the present invention includes: a head which has a vibrating body combined with a probe in a quartz vibrator and a first moving device moving the vibrating body in a z-axis direction; a vibration module which has a vibrator vibrating the vibrating body and a sensor sensing the output voltage of the vibrating body; a sample stage which has a plate on which a sample is arranged and a second moving device moving the plate in x-axis and y-axis directions; an optical signal module which has a signal converter converting an optical signal, collected by the probe and an illuminator illuminating the sample, into a radio signal; and a feedback control unit which senses the signal of the signal converter and the signal of the vibration module and controls the first moving device and the second moving device. The near field scanning optical microscope system is able to control an interval between a probe and the surface of a sample to be constant even if liquid is continuously evaporated while the sample in the liquid is measured by measuring the resonant frequency and output voltage of a vibration body again whenever an x-axis direction scanning of the probe is completed.