Pressure sensor, sensor probe comprising a pressure sensor, medical apparatus comprising a sensor probe and a method of fabricating a sensor probe

摘要

A pressure sensor includes a flexible membrane deformable in response to pressure. The flexible membrane covers a cavity and includes a strain gauge that produces signals corresponding to deformation of the flexible membrane. The flexible membrane is a flexible monolithic integrated circuit foil.

主权项

1. A pressure sensor comprising:
a substrate having a cavity; a flexible membrane deformable in response to a pressure, wherein the flexible membrane covers the cavity in the substrate; and a strain gauge that produces signals corresponding to deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil comprising the strain gauge, wherein the flexible monolithic integrated circuit foil further comprises signal processing circuitry, wherein the cavity is connected to a channel for acting as an inlet or an outlet for fluid entrance or exit from the cavity to regulate a pressure inside the cavity, and wherein a pressure control device controls the entrance or the exit of the fluid to control the pressure inside the cavity based on the signals from the strain gauge.