发明名称 |
Temperature stabilization system to stabilize a temperature of an article |
摘要 |
An article support is constructed to support an article. The article support includes a back fill structure constructed to supply and extract a thermal buffering fluid to and from the article support. The back fill structure is connected to an extraction duct that is constructed and arranged to extract at least a gas phase of the thermal buffering fluid from the back fill structure. The back fill structure is connected to a supply duct, constructed and arranged to supply a liquid phase of the thermal buffering fluid to the back fill structure. The back fill structure is arranged to have the thermal buffering fluid brought in a combined liquid and gas phase to thermally connect with the article. |
申请公布号 |
US8994917(B2) |
申请公布日期 |
2015.03.31 |
申请号 |
US200912999512 |
申请日期 |
2009.07.22 |
申请人 |
ASML Netherlands B.V. |
发明人 |
Ottens Joost Jeroen;Jacobs Johannes Henricus Wilhelmus |
分类号 |
G03B27/52;G03B27/58;G03B27/32;G03F7/20;H01L21/67 |
主分类号 |
G03B27/52 |
代理机构 |
Pillsbury Winthrop Shaw Pittman LLP |
代理人 |
Pillsbury Winthrop Shaw Pittman LLP |
主权项 |
1. A temperature stabilization system constructed to stabilize a temperature of an article, the system comprising:
an article support constructed to support the article when mounted in an article support position, the article support comprising a plurality of protrusions configured to provide a flat plane of support for the article; a back fill structure formed by the plurality of protrusions, the back fill structure constructed and arranged to supply a buffering fluid to make direct contact with the article and to extract the buffering fluid from direct contact with the article; a boundary wall defining a boundary wall height that lies below the flat plane of support for the article and configured to confine the buffering fluid in a liquid phase and allow leakage of the buffering fluid in a gas phase; an extraction duct constructed and arranged to extract at least the buffering fluid from the back fill structure in at least the gas phase; and a supply duct constructed and arranged to supply the buffering fluid in at least the liquid phase, the back fill structure being arranged to have the buffering fluid brought in a combined liquid and gas phase when establishing thermal direct contact between the buffering fluid and the article. |
地址 |
Veldhoven NL |