| 主权项 |
1. A direct drive arrangement for controlling pressure volume within a confinement region of a processing chamber of a plasma processing system during substrate processing, wherein said confinement region is a chamber volume surrounded by a set of confinement rings, said direct drive arrangement comprising:
a pressure sensor configured at least for collecting pressure data about said pressure volume within said confinement region during said substrate processing; a plurality of plunger assemblies within a plunger arrangement, each of the plurality of plunger assemblies coupled to an uppermost ring of the set of confinement rings; a pair of sensors positioned on the plunger arrangement, the pair of sensors configured at least to establish a maximum distance for each plunger assembly to move vertically, wherein said pair of sensors include a home sensor and a far sensor, wherein a gap between the pair of sensors provides the maximum distance the plunger assembly may travel, and wherein at least one of the sensors of the pair of sensors may be repositioned; a plurality of motor assemblies disposed on an upper surface of a top plate of the processing chamber, wherein each motor assembly of said plurality of motor assemblies includes: a motor configured to move a plunger assembly of said plurality of plunger assemblies, an encoder configured to record a set point position value for each plunger assembly, and a motor shaft connecting said motor to said plunger assembly; a plurality of couplers that are each directly connected to a motor assembly and a plunger assembly; a set of circuits configured at least to drive said plurality of motor assemblies to move said plurality of plunger assemblies to change said pressure volume within said confinement region, provide power to said plurality of motor assemblies to move said plurality of plunger assemblies, receive a plurality of set point position values from said plurality of encoders, and feedback the plurality of set point position values from said plurality of encoders to a control module; wherein the control module is configured to receive said plurality of set point position values from said set of circuits, receive said pressure data from said pressure sensor, calculate a set of new set point position values for said plurality of plunger assemblies, and send said set of new set point position values as a set of instructions to said set of circuits,such that the control module is configured to control the plurality of motor assemblies for vertically moving a plurality of couplers that are each directly connected to a motor assembly and a plunger assembly in order to change said pressure volume within said confinement region by vertically moving said set of confinement rings. |
