Capacitor and method for fabricating the same

摘要

A method for fabricating a capacitor includes forming a mold structure over a substrate, wherein the mold structure has a plurality of open parts and has a mold layer stacked with a support layer; forming cylinder type lower electrodes in the open parts; forming a first upper electrode over an entire surface of a structure including the cylinder type lower electrodes to fill the cylinder type lower electrodes; defining a through hole that passes through portions of the first upper electrode and the support layer; removing the mold layer through the through hole and exposing the cylinder type lower electrodes; forming a second upper electrode to fill the through hole and spaces between the cylinder type lower electrodes; and forming a third upper electrode to connect the second upper electrode and the first upper electrode with each other.

主权项

1. A method for fabricating a capacitor, comprising:
forming a plurality of cylinder type lower electrodes; forming a first upper electrode inside the cylinder type lower electrodes; forming a second upper electrode outside the cylinder type lower electrodes after the forming of the first upper electrode; and forming a third upper electrode that connects the first upper electrode and the second upper electrode.