Thin flexible sensor

摘要

The present invention provides a sensor (100, 300, 400) that includes a thin and substantially flat flexible substrate (102, 406) having one or more sensor arrays (104, 302), a power source (106, 416), an output interface (108, 418) and a processor or analog circuit (304), all of which are disposed on the substantially flat flexible substrate (102, 406). The substrate (102, 406) can be any shape (e.g., rectangular, circular, a polygon, an irregular shape that is decorative) and made from a polymer, metal film or other suitable material. Note that the substrate can be rigid or semi-flexible instead of flexible. A protective layer may cover the sensor array (104, 302), the power source (106, 416), and the processor or analog circuit (304). Alternatively, a protective covering can be used to encapsulate the device. The one or more sensor arrays (104, 302) measure acceleration, force or pressure.

主权项

1. A sensor (100, 300, 400) comprising:
a thin and substantially flat flexible substrate (102, 406); one or more sensor arrays (104, 302) fabricated on the flexible substrate (102, 406) that measure acceleration, force or pressure, wherein each sensor array includes at least a pressure sensor comprising a bridge structure having a central plate suspended over a pit by at least two bridge arms and one or more piezoresistors disposed on at least one of the bridge arms; an output interface (108, 418) disposed on the flexible substrate (102, 406); a processor or an analog circuit (304) disposed on the flexible substrate (102, 406) and connected to the one or more sensor arrays (104, 302) and the output interface (108, 418); a power source (106, 416) disposed on the flexible substrate (102, 406) and connected to the one or more sensor arrays (104, 302), the output interface (108, 418), and the processor or the analog circuit (304); and the flexible substrate (102, 406), the one or more sensor arrays (104, 302), the output interface (108, 418), the processor or an analog circuit (304) and the power source (106, 416) form a flexible integrated circuit that can be stretched, wrinkled or flexed without degradation of the flexible integrated circuit.