Multi-inlet vacuum pump

摘要

A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).

主权项

1. A multi-inlet vacuum pump comprising
a first pump device comprising a first rotor element with a plurality of first rotor disks serially arranged in the conveying direction, a second pump device comprising a second rotor element with a plurality of second rotor disks serially arranged in the conveying direction, a main inlet through which a first fluid flow is sucked by the first pump device and is conveyed in the direction of the second pump device, and an intermediate inlet through which a second fluid flow is sucked by the second pump device and is conveyed in the direction of a pump outlet, wherein the diameter of at least the last rotor disk of the first pump device substantially corresponds to the diameter of the first rotor disk of the second pump device, the diameter of at least one first rotor disk of the first rotor element being smaller than the diameter of the second rotor disks.