Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method

摘要

A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body. In this case, because a configuration in which the arm member irradiates a measurement beam on the grating is employed, there is no adverse effect due to the drive of the moving body, unlike the case when an encoder system is arranged on a stage surface plate. Accordingly, it becomes possible to drive the movable body with good precision.

主权项

1. An exposure apparatus that exposes a substrate with illumination light via a projection optical system, the apparatus comprising:
a base member placed under the projection optical system and having a surface substantially parallel to a predetermined plane which is orthogonal to an optical axis of the projection optical system; a substrate stage that is placed on the base member and holds the substrate, the substrate stage having
a holding member having a mounting area for the substrate provided on an upper surface side and a measurement surface with a grating provided on a lower surface side, anda main body section which supports the holding member so that a space is formed between the measurement surface and the surface of the base member; a drive system that has an electromagnetic motor and drives the substrate stage; a measurement system that has a head section placed lower than the measurement surface under the projection optical system and measures positional information of the substrate stage by irradiating the measurement surface with a measurement beam from below via the head section that is placed in the space as the substrate stage is positioned to face the projection optical system; and a controller coupled to the drive system and controlling a drive of the substrate stage by the electromagnetic motor based on the positional information measured by the measurement system.