Raman spectroscopy using diffractive MEMS

摘要

A Raman spectrometer including a laser excitation source, edge filters, and detection optics that direct light into a spectrograph. A spectrograph containing a dispersive element and optics that directs various wavelengths of light onto a segmented diffractive MEMS light modulator array. The MEMS array, depending on actuation state, directs light either to or away from a single detector. Control electronics drive the MEMS light modulator for either sequential wavelength measurement or multiplexed wavelength measurement (Hadamard for example).

主权项

1. A Raman spectrometer comprising:
an excitation source generating a Raman signal directly towards a sample; a filter for receiving the Raman signal from the sample; a spectrograph including, a slit and lens for receiving the Raman signal from the filter, a diffraction grating for dispersing the Raman signal, a first optic for focusing the diffracted Raman signal on to a segmented diffractive MEMS array, each segment having two states, a controller for providing control signals to the segmented diffractive MEMS array, a second optic for collimating a portion of the diffracted Raman signal from the MEMS array to the diffraction grating, the diffraction grating directing the Raman signal such that each segment in the MEMS array receives a different wavelength range of a Raman spectrum.