| 摘要 |
PROBLEM TO BE SOLVED: To provide an air levitation-type noncontact support mechanism that makes the used amount of air smaller than ever, and a carrier device comprising the same.SOLUTION: A support mechanism, the top surface of which assumes a flat disc shape, supports a support object in a noncontact state by generating an air flow between the top surface and the support object. In the support mechanism, a groove part assuming a circular shape in a view from the top surface and inclined by an angle of 20-60° with respect to a radial direction of the top surface is provided in a position near an outer periphery of the top surface. |
