| 摘要 |
PROBLEM TO BE SOLVED: To execute a high-precision compensation within a short time.SOLUTION: A data compensation device 72 generates, by compensating vector data of a pattern element provided as element input data, compensated data. On an occasion for prompting a subsidiary point setting unit 724 to set, amidst the compensation, subsidiary points for sides of the pattern element, a first strain vector, a second strain vector, and a third strain vector respectively expressing strains of first, second, and third points set atop the sides of the pattern element are calculated based on the strain of the arrangement region of the pattern element acquired by a strain acquisition unit 722. Only in a case where the first component length or second component length of the side strain vector calculated based on the first strain vector, second strain vector, and third strain vector is equal to or greater than a strain threshold set in advance, the second point is set as a subsidiary point, and the position thereof is compensated by a position compensation unit 725. It accordingly becomes possible to compensate, in a high precision within a brief time, the respective element input data included within the input data. |
