| 摘要 |
PROBLEM TO BE SOLVED: To provide a solar cell inspection apparatus configured to reduce the influence of noise caused by irregularly reflected light in inspecting a solar cell by means of PL inspection, and to improve the accuracy of detecting defect or poor quality of the solar cell.SOLUTION: A solar cell inspection apparatus 100 using a photoluminescence (PL) includes: an LED light source 10 for surface-irradiating a solar cell M to be inspected with inspection light L; a power source 20 for applying a reverse bias current to the solar cell M; an imaging unit 30 for imaging a surface to be inspected of the solar cell; an image processing unit 40 which processes an image of the surface C to be inspected; and a display unit 50 which displays a processed image processed by the image processing unit 40. The image processing unit 40 forms a difference image between a first PL emission image obtained by surface-irradiating the solar cell M with no reverse bias current applied thereon with the inspection light L, and a second PL emission image obtained by surface-irradiating the solar cell M with the reverse bias current applied thereon with the inspection light L, as a processed image. |
